Advantages of Advenira coatings:
- Functional: conformal, uniform coating of various chamber parts even with complex features (e.g. showerhead vias, rounded parts, solid angles, large components)
- Features: Reduced defects, particles, and metal contamination
- Cost: Improved MTBC and MTBF for longer lifetime, higher tool utilization, and Overall Equipment Efficiency
Semiconductor Equipment: innovative protective layers that reduce defects and extend lifetime
To download our Semicon West 2012 brochure, click here.
Semiconductor equipment manufacturers are constantly striving for better, higher performance systems and chambers to keep up with the ever-shrinking node, and fabricate the complex IC required for modern electronics. Advenira coatings can both serve as an enabling technology for specific processes by reducing particles, defects, and metal contamination, and increase the lifetime of existing parts and components for higher yield and lower CoO.
- Key impact: Enabling technology, defect reduction, lower CoO
Performance coatings by Advenira:
- Protective and anti-corrosion coatings for chambers, process kits and individual parts
- Anti-sticking coatings for specific parts